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Semicon Shanghai 2012
Visit us at SEMICON Shanghai, fom 20th to 22nd of March.
Find out our newest developments in MEMS production.
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Contact Us
info@m-o-t.info
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µCHEM
• Designed for the use in clean room environment, the shell is made of polypropylene
• Suitable for etching application in the field of micro technology and semiconductors
• Heatable Quartz Tank for clean wafer processing
• Additional process cells could be integrated, made of PTFE, PVDF, PP,…
• Circulation and Heating systems
Additional components
Spin coater, Hot plates, Megasonic cleaning systems…
• Rinsing cell or Quick Dump Rinser
• Automation for handling wafer baskets possible
• Customized solutions are possible
• Control of the system by using an Operator Panel
