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Wet Bench System µCHEM

• Designed for the use in clean room environment, the shell is made of polypropylene or stainless steel for solvent applications
• Suitable for etching application in the field of micro technology and semiconductors
• Heatable Quartz Tank for clean wafer processing
• Additional process cells could be integrated, made of PTFE, PVDF, PP,…
• Circulation and Heating systems
• fire extinguishing on request
• fully automatic process
• fully automatic chemical drain and dosing on request
• compatible to different wafer size up to 12", fully automatic handling of the Carriers

 

 

Additional components

• Spin coater, Hot plates, Megasonic cleaning systems…
• Rinsing cell or Quick Dump Rinser
• Automation for handling wafer baskets possible
• Customized solutions are possible

 

MOT Semicon can help you to design specific workflow concepts offering you flexible high grade wet bench solutions.