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Wet Bench System µCHEM
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Designed for the use in clean room environment, the shell is made of polypropylene or stainless steel for solvent applications
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Suitable for etching application in the field of micro technology and semiconductors
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Heatable Quartz Tank for clean wafer processing
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Additional process cells could be integrated, made of PTFE, PVDF, PP,…
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Circulation and Heating systems
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fire extinguishing on request
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fully automatic process
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fully automatic chemical drain and dosing on request
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compatible to different wafer size up to 12", fully automatic handling of the Carriers
Additional components
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Spin coater, Hot plates, Megasonic cleaning systems…
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Rinsing cell or Quick Dump Rinser
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Automation for handling wafer baskets possible
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Customized solutions are possible
