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Spin Rinse Dryer µSRD
CORPUS
Material: PP white or Stainless Steel
optional PPs white, PVDF (with yellow card),
Door material: PP white or PVC transparent,
SIMPLE AND RELIABLE SETUP AND OPERATION
The MOT SRD suits for all batch applications. The sophisticated MOT μSRD software makes the operation extremely easy by using a Touch Panel; the SRD system offers 10 different built-in process programs according to different wafers. To further simplify operation for the user, a full range of settings can be pre-configured before the MOT μSRD is sent out.
KEY BENFITS
Compliant designed for clean-room environment, easy to be integrated into Wet Bench systems.
Easy-to-Use GUI operation that anyone can learn. The operator only need to select the recipe.
Economical and Efficient Quick ramp DC-motor integrated; the fully automated system provide excellent reliability.
Flexible The MOT μSRD can be programmed to select individually or multiple different types of recipe within a single program; media dispense, rinse and spin events can also be programmed in any order desired.
FLEXIBLE OPTIONS
Customized Rotor Design possible
Resistivity Monitor
Anti Static with N2 purge
DI-Heater
DI water recirculation
Extended Parts & Labor Warranty