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Spin Rinse Dryer µSRD

 

CORPUS

Material: PP white or Stainless Steel

optional PPs white, PVDF (with yellow card),

Door material: PP white or PVC transpa­rent,

 

SIMPLE AND RELIABLE SETUP AND OPERATION

The MOT SRD suits for all batch applications. The sophisti­cated MOT μSRD software makes the operation extremely easy by using a Touch Panel; the SRD system offers 10 different built-in process programs according to different wafers. To further simplify operation for the user, a full range of settings can be pre-configured before the MOT μSRD is sent out.

 

KEY BENFITS

Compliant designed for clean-room environment, easy to be integrated into Wet Bench systems.

Easy-to-Use GUI operation that anyone can learn. The ope­rator only need to select the recipe.

Economical and Efficient Quick ramp DC-motor integrated; the fully automated system provide excellent reliability.

Flexible The MOT μSRD can be programmed to select indi­vidually or multiple different types of recipe within a single program; media dispense, rinse and spin events can also be programmed in any order desired.

 

FLEXIBLE OPTIONS

Customized Rotor Design possible

Resistivity Monitor

Anti Static with N2 purge

DI-Heater

DI water recirculation

Extended Parts & Labor Warranty