Spin Rinse Dryer μSRD
![](https://mot-semicon.com/wp-content/uploads/sites/2/2024/06/Header_Website_SPIN_RINSE_DRYER_µSRD-2-scaled.jpg)
Spin Rinse Dryer
CORPUS
Material: PP white or Stainless Steel
Door Material: PP white or PVC transparent
Wafer Size: up to 300mm
![](https://mot-semicon.com/wp-content/uploads/sites/2/2021/06/15_Spin-Rinse-Dryer_01-tinified.png)
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SIMPLE AND RELIABLE SETUP AND OPERATION
The MOT SRD suits for all batch applications. The sophisticated MOT μSRD software makes the operation extremely easy by using a Touch Panel; the SRD system offers 10 different built-in process programs according to different wafers. To further simplify operation for the user, a full range of settings can be pre-configured before the MOT μSRD is sent out.
![](https://mot-semicon.com/wp-content/uploads/sites/2/2024/06/µSRD-200B2-2-1024x683.jpg)
![](https://mot-semicon.com/wp-content/uploads/sites/2/2024/06/µSRD-200B2-4-3-889x1024.jpg)
Your benefits
KEY BENFITS
Compliant designed for clean-room environment, easy to be integrated into Wet Bench systems. Easy-to-Use GUI operation that anyone can learn. The operator only need to select the recipe.Economical and Efficient Quick ramp DC-motor integrated; the fully automated system provide excellent reliability.Flexible The MOT μSRD can be programmed to select individually or multiple different types of recipe within a single program; media dispense, rinse and spin events can also be programmed in any order desired.
FLEXIBLE OPTIONS
Customized Rotor Design possible
Resistivity Monitor
Anti Static with N2 purge
DI-Heater
DI water recirculation
Extended Parts & Labor Warranty